ATDF - Advanced Tool Development Facility

With global semiconductor R&D costs increasing at almost twice the rate of revenue, the industry needs solutions for making R&D more efficient. ATDF provides access to world-class processing and prototyping capabilities with the speed needed to enable rapid development.

In short, ATDF is an R&D foundry.

ATDF is where semiconductor manufacturers, equipment and materials suppliers, universities, and other high tech firms from around the world come to perform cutting-edge research and development.

Our engineers develop baseline processes that bring new tools and materials to manufacturing at reduced cost. With highly customized development activities, our customers have access to the processes, electrical data and equipment necessary to bring products to market—fast.

Because ATDF helps set the Roadmap for future technology nodes, we are able to offer next-generation technology today.

ATDF Nanofabrication Capabilities

Advanced transistor technologies<br />
-Atomic layer deposition <br />
-High-k dielectrics, metal gates <br />

Non-classical CMOS processing<br />
-MuGFET <br />
-Nanomaterials <br />

Cu/Low-k processing for etch, cleans, and CMP<br />
-Wide variety of low-k materials <br />
-Large selection of integration schemes <br />

Electrical and analytical testing<br />
-Parametric testing <br />
-Bench testing <br />
-TEM, SEM, Auger, SIMS, TXRF, FIB-SEM, ICP-MS, AFM, FTIR <br />

Lithography<br />
-193 nm patterning (200/300mm) <br />
-248 nm patterning (200/300mm)<br />

Facility

- 62,000 sq. ft. cleanroom<br />
- ~200 process and analytical tools <br />
- Complete 200 mm FEOL Flow <br />
- Complete 300 mm Cu/low-k multilevel interconnect <br />
- 7 day / 24 hour production <br />
- 11,000 wafer starts per month <br />

External links

ATDF homepage